Resin molded semiconductor device and manufacturing method thereof

ABSTRACT

This invention is directed to provide a method of manufacturing a resin molded semiconductor device with high reliability by preventing a resin leakage portion from occurring due to burrs on a lead frame formed by punching. The method of manufacturing the resin molded semiconductor device according to the invention includes bonding a semiconductor die on an island in a lead frame, electrically connecting the semiconductor die with the lead frame, resin-molding the lead frame on which the semiconductor die is bonded, and applying prior to the resin-molding a compressive pressure that is higher than a clamping pressure applied in the resin-molding to a region of the lead frame being clamped by molds in the resin-molding of the lead frame.

CROSS-REFERENCE OF THE INVENTION

This application claims priority from Japanese Patent Application No.2008-220982, the content of which is incorporated herein by reference inits entirety.

BACKGROUND OF THE INVENTION

1. Field of the Invention

This invention relates to a resin molded semiconductor device and itsmanufacturing method.

2. Description of the Related Art

To manufacture a resin molded semiconductor device, a lead frame isprepared, each of various kinds of semiconductor dice, a passive elementor the like is die-bonded to the lead frame with solder, silver paste orthe like, the semiconductor die or the like and the lead frame areelectrically connected by wire-bonding or the like through an aluminumwire or a gold wire, and then the semiconductor device is completed byresin-molding the lead frame excluding outer lead portions, followed bycutting a tie bar and folding the leads or the like as required.

The assembly process of the resin molded semiconductor device asmentioned above is described, for example in “All about Leading EdgePackaging Technologies—with Illustrations” edited by HandotaiShingijutsu Kenkyukai, Sep. 25, 2007, published by Kogyo ChosakaiPublishing Co., Ltd.

In the assembly process of the resin molded semiconductor device asdescribed above, an unnecessary resin film 104 is inevitably formed in aregion surrounded by a resin package 101 that is filled with the resin,outer leads 102 and a tie bar 103 as shown in FIG. 4 at a completion ofa resin-molding process step, as a result of the resin molding method.However, a resin leakage portion 105 as shown in FIG. 4 is usually notformed on a surface of the tie bar 103 or the outer lead 102. It isbecause resin injection in the resin-molding is carried out while anupper mold 115 and a lower mold 106 apply a high pressure to a leadframe 107 which bears a semiconductor die 108 bonded thereon andelectrically connected with the semiconductor die 108 through a bondingwire 110 or the like as shown in FIG. 5 so that the resin does not leak.

In this case, the tie bar 103, which is formed between the outer leads102 and serves to hold the outer leads 102 until the resin-moldingprocess step is completed, also serves as a dam bar 109 as shown in FIG.5 and FIG. 6 to block and prevent the injected resin from leaking out ofthe resin package 101. Therefore, the injected resin neither leaks outof the dam bar 109 nor forms the resin leakage portion 105 on thesurface of the tie bar 103 or the outer lead 102 outside the resinpackage 101, although the injected resin forms the unnecessary resinfilm 104 in the region surrounded by the resin package 101, the outerleads 102 and the dam bar 109, i.e. the tie bar 103.

However, what is stated above holds true only when the surfaces of thelead frame 107 have flatness and are firmly and tightly pressed againstthe upper mold 115 and the lower mold 106 in the resin-molding processstep. In reality, however, the lead frame 107 that is formed by punchinghas burrs 111 consisting of fine projections and depressions on itssurface as shown in FIG. 7B that is an enlarged view of a portion markedwith a dashed line circle in FIG. 7A. Thus there are caused very narrowgaps between the lead frame and the mold in some cases, even when thelead frame 107 is pressed by the upper mold 115 and the lower mold 106from above and below. As a result, the resin leaks through the gaps toform the resin leakage portion 105 made of thin resin film on thesurfaces of the tie bar 103 and the outer leads 102 as shown in FIG. 4.The resin leakage portion 105 flakes off in a subsequent process stepsuch as folding the leads to make dust that causes problems in yield andreliability.

It should be noted that the resin film 104 formed in the regionsurrounded by the resin package 101, the outer leads 102 and the tie bar103 can be relatively easily removed by sandblasting, air showering orthe like and that the resin leakage portion 105 sticking firmly to theouter leads 102 and the like can be not easily removed by the meansmentioned above.

SUMMARY OF THE INVENTION

The invention provides a method of manufacturing a resin moldedsemiconductor device. The method includes providing a lead framecomprising an island, bonding a semiconductor die on the island of thelead frame, electrically connecting the semiconductor die to the leadframe, resin-molding the lead frame on which the semiconductor die isbonded while clamping the lead frame with a mold so as to apply aclamping pressure to a region of the lead frame, and applying acompressive pressure to the region of the lead frame prior to theresin-molding. The compressive pressure being greater than the clampingpressure.

The invention also provides a resin molded semiconductor device thatincludes a lead frame, a semiconductor die bonded to the lead frame andelectrically connected to the lead frame, and a resin package housingthe lead frame and the semiconductor die. The lead frame including adent portion extending from inside the resin package to outside theresin package, and the surface roughness of the dent portion is smallerthan the surface roughness of the lead frame not having the dentportion.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A and 1B are oblique perspective figures showing a lead frameafter burrs on the lead frame are flattened by a method of manufacturinga resin molded semiconductor device according to an embodiment of thisinvention.

FIG. 2A is a plan view showing the method of manufacturing the resinmolded semiconductor device according the embodiment of this invention.FIG. 2B is a cross-sectional view showing a section A-A in FIG. 2A.

FIGS. 3A and 3B are cross-sectional views showing a process step ofapplying a compressive pressure to flatten the burrs on the lead framein the method of manufacturing the resin molded semiconductor deviceaccording to the embodiment of this invention.

FIG. 4 is a plan view showing a method of manufacturing a resin moldedsemiconductor device according a prior art.

FIG. 5 is a cross-sectional view showing a state of resin-molding in aresin-molding process step.

FIG. 6 is a perspective plan view looked from above an upper mold,showing a state in which dam bars prevent the resin injected into theresin molded device from flowing beyond an intended region.

FIGS. 7A and 7B are oblique perspective figures showing the burrs on thelead frame formed by punching.

DETAILED DESCRIPTION OF THE INVENTION

An embodiment of this invention is hereafter described referring to thedrawings.

A portion of an SIP (Single In-line Package) is shown in the drawingsand described since it is sufficient for understanding features of thisinvention that an outer leads 2 exposed out of a resin package 5, a tiebar 3 and a lower edge of the resin package 5 are shown and explained.

An embodiment of this invention is explained referring to FIGS. 1A, 1B,2A and 2B. First, there is provided a lead frame 1 as shown in FIG. 1A,which is identical to the lead frame 107 described above and shown inFIG. 7A. The lead frame 1 has burrs consisting of fine projections anddepressions on its surface derived from punching, which are identical tothe burrs 111 as shown in FIG. 7B. Thus, the resin leakage portion 105would be caused as in the prior art, if the resin-molding is performedwithout any countermeasures.

Because the projections and depression of the burrs 11 are very fine,they are flattened by the clamping pressure of the mold and cause noproblem even when the resin-molding is performed without anycountermeasures. In some cases, however, the resin leakage portion 105is formed due to variations in the projections and depressions of theburrs 111, variations in the clamping pressure of the mold in theresin-molding process step, a lack of clamping pressure when a mold fora single row frame is used in place of a mold for a triple row frame orthe like.

A feature of this invention is that the resin leakage portion 105 isprevented from occurring by flattening prior to the resin-moldingprocess step the projections and depressions of the burrs on the leadframe 1, which are identical to the burrs 111 as shown in FIG. 7B. Thereis introduced a process step to apply a compressive pressure to the leadframe 1, as shown in FIG. 3A. The process step is usually performedbefore a semiconductor die 9 is bonded to the lead frame 1. In theprocess step to apply the compressive pressure, the compressive pressurethat is larger than the clamping pressure applied in the resin-moldingprocess step is applied in directions indicated by upward and downwardarrows in FIG. 3A to a region larger than a region of the lead frame 1including the tie bar 3 to which the clamping pressure is applied by themold in the resin-molding process step.

The burrs on the lead frame 1 caused by the punching, which areidentical to the burrs 111 consisting of the projections and depressionsas shown in FIG. 7B, are flattened as shown in FIG. 1B, that is anenlarged view of a portion marked with a dashed line circle in FIG. 1A,by applying the compressive pressure. As a result, the burrs in theregion to which the clamping pressure is to be applied by the molds inthe resin-molding process step are turned into flattened burrs 6. Afterthat, the semiconductor die 9 is bonded to the lead frame 1 andelectrically connected with the lead frame 1 through a bonding wire 10before the resin-molding is performed.

Since the fine burrs on the lead frame 1 are turned into the flattenedburrs 6 in the process step to apply the compressive pressure to thelead frame 1, the resin leakage portion 105 as shown in FIG. 4 is notformed on the surface of the outer lead 2 or the tie bar 3 clamped bythe molds in the resin-molding process step as shown in FIG. 2A.Although an unnecessary resin film 4 is formed in a region surrounded bythe resin package 5, the outer leads 2 and the tie bar 3, it can beremoved by sandblasting or the like to prevent the problems fromoccurring as described above.

After that, tie bar 3 is cut and the outer leads 2 are folded asrequired to complete the desired resin molded semiconductor device.

By introducing the process step to apply the compressive pressure to thelead frame 1, it is made possible to form a small step 7 on the leadframe 1 at a location interposed between and crushed by an upper plate112 and a lower plate 113 as shown in FIG. 3B that is an enlarged viewof a portion marked with a dashed line circle in FIG. 3A. As a result, ashallow dent 8 is formed in the lead frame 1 in a region pressed by theupper plate 112. The step 7 at one end of the dent 8 is sealed insidethe resin package 5, as shown in FIG. 2B that is a cross-sectional viewof a section A-A in FIG. 2A.

In the case of a semiconductor device of high electrical conductivitysuch as a power device, the lead frame 1 used in it is as thick as 0.5mm, which makes the dent 8 relatively deep.

Thus the step 7 of the dent 8 inside the resin package 5 serves toanchor the lead frame 1 so that the outer lead 2 does not easily comeoff when an external force is applied to the outer lead 2, an island 11or the like is prevented from being affected by the external force, andthe semiconductor die 9, the bonding wire 10 and the like inside theresin package 5 are protected. However, since the lead frame 1 is asthin as around 0.2 mm in the case of a semiconductor device of mediumelectrical conductivity and having a small or medium number of pins, anda little thicker than 0.1 mm in the case of a semiconductor devicehaving a large number of pins, introducing the process step to apply thecompressive pressure forms on the pressed surface of the lead frame 1the dent 8 that is not deep enough to serve as the anchor.

In this case, the lower plate 113 shown in FIG. 3A is provided with adent while the upper plate 112 is provided with a projection that fitsthe dent in the lower plate 113. Then the lead frame 1 is placed on thelower plate 113 and firmly pressed by the upper plate 112 to form thedent 8 made of a step larger than the thickness of the lead frame 1 andsmall enough to be housed in the resin package 5 so that the dent 8 mayserve as an anchor effectively. The dent 8 as described above may beformed in the case of the thick lead frame used in the semiconductordevice of high electrical conductivity.

Although the SIP is described in the embodiment, this invention may beapplied to other packages such as a QFP (Quad Flat Package) within thescope of the invention.

According to the embodiment of this invention, the resin leakage portion105 is not formed on the surface of the outer lead 102 or the like inthe resin-molding process step. As a result, there is no such case thatthe resin leakage portion 105 flakes off in subsequent process step suchas folding the leads to make dust.

1. A method of manufacturing a resin molded semiconductor device,comprising: providing a lead frame comprising an island; bonding asemiconductor die on the island of the lead frame; electricallyconnecting the semiconductor die to the lead frame; resin-molding thelead frame on which the semiconductor die is bonded while clamping thelead frame with a mold so as to apply a clamping pressure to a region ofthe lead frame; and applying a compressive pressure to the region of thelead frame prior to the resin-molding, the compressive pressure beinggreater than the clamping pressure.
 2. The method of claim 1, whereinthe applying the compressive pressure forms a dent in the lead frame. 3.A resin molded semiconductor device, comprising: a lead frame; asemiconductor die bonded to the lead frame and electrically connected tothe lead frame; and a resin package housing the lead frame and thesemiconductor die, wherein the lead frame comprises a dent portionextending from inside the resin package to outside the resin package,and a surface roughness of the dent portion is smaller than a surfaceroughness of the lead frame not having the dent portion.